Vibration Isolation Case Studies

YOUSHIZE TECH ZEISS GeminiSEM 360 FIB-SEM DVIA-ML1000 installation report — following installation at Yancheng for end user Yancheng High-tech Zone, the DVIA-ML1000 active vibration isolation platform was tuned and measured with the equipment in the IDLE state, with the floor and the DVIA-ML1000 platform both passing on the vertical, left-to-right, and front-to-back axes. The tuning request, vibration specification, per-axis Autospectrum plots, and the installation photo are published.

Thermo Fisher Scientific Apreo 2S SEM DVIA-ML1000 installation report — following installation at Shizuishan for end user Ningxia Orient Tantalum Industry Co. Ltd., the DVIA-ML1000 active vibration isolation platform meets the VC-F vibration specification (the floor fails on vertical, left-to-right, and front-to-back, while the DVIA-ML1000 platform passes all three axes). The tuning request form, per-axis VC Curves, and the installation photo are published.

DVIA-ML3000S (S/N 260406R2-1) installation report at Biel Crystal Manufactory Limited in Huiyang, China — Raith EBPG5200 Plus E-Beam Lithography system, supplied. Published figures: the tuning request work order and the vertical / left-to-right / front-to-back Autospectrum data obtained via the UI program. The horizontal and vertical vibration specifications run from 8 µm/s RMS at 1 Hz to 12.5 µm/s RMS at 100 Hz; the Measurement Summary cites See Section 9, with all three axes PASS on both the floor and the DVIA-ML3000S platform.

DVIA-ML3000 (260319R2) installation report at Tier-1 Semiconductor Giheung campus S1 Line, 1F laboratory — ZEISS X-ray Microscope Xradia 520 Versa. VC-C equipment spec; B&K Front End Type 3040-A-040 with Pulse Labshop22 and a PCB 393B05 accelerometer; per-axis VC Curves and Autospectrum for vertical, left-to-right, and front-to-back; standard Reference vibration criteria as a markdown table.

YDRICQS (Quantum Science and Technology Yangtze River Delta Industrial Innovation Center, Suzhou, China) Thermo Fisher Scientific Helios 5CX FIB-SEM DVIA-ML1000 installation report — the active isolation platform meets the VC-F vibration specification on all axes (floor fails only on vertical; the DVIA-ML1000 platform passes vertical, left-to-right, and front-to-back). Per-axis Auto Spectrum and VC curves, the client tuning request form, and the installation photo are published.

Changdi New Materials Technology (Shanghai, China) Hitachi High-Tech SU3800SE FE-SEM DVIA-ML1000 installation report — the active isolation platform meets the vibration specification on all axes (floor fails on vertical while passing left-to-right and front-to-back; the DVIA-ML1000 platform passes all axes); vertical/left-to-right/front-to-back autospectrum and equipment photo published.