Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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Institute for Basic Science NIKON ECLIPSE DVIA-UD350 (P15) Performance Report
June 2019 performance worksheet (report 2019-06-11): NIKON_ECLIPSE at Institute for Basic Science 2F analysis lab on DVIA-UD350 (P15). VC-Class summary (floor D/E/F vs isolation tabletop G/G/G), UD350 internal-program Z/X/Y captures, and octave-band floor vs tabletop plots. Word decorative header bitmap (image1) omitted from publication; the source form has no Reference section.
Institute for Basic Science NIKON ECLIPSE DVIA-UD350 (P12) Performance Report
June 2019 performance worksheet (report 2019-06-11): NIKON_ECLIPSE at Institute for Basic Science 2F analysis lab on DVIA-UD350 (P12). VC-Class summary (floor D/E/E vs isolation tabletop G/G/G), UD350 internal-program Z/X/Y captures, and octave-band floor vs tabletop plots. Word decorative header bitmap (image1) omitted from publication.
Institute for Basic Science 2F Analysis Lab NIKON ECLIPSE TE300 DVIA-UD350 P13 Performance Installation Report
June 2019 compact worksheet after DVIA-UD350 isolation for NIKON ECLIPSE TE300 at Institute for Basic Science (2F analysis lab), project P13: site checklist, trip and report dates, VC-Class summary (general test condition: floor C/E/E vs platform G/G/G), UD350 internal-program Z/X/Y captures, and octave-band floor vs platform-top plots. Word header decoration (image1) omitted from publication; Reference uses the site VC criterion markdown table only.
Sungkyunkwan University NIKON C11330 (ORCA-Flash4.0) DVIA-UD350 (P5) Performance Report
May 2019 performance worksheet (report 2019-05-13; site visit 2019-05-09): NIKON_C11330 (ORCA-Flash4.0) at Sungkyunkwan University N Center 2nd floor on DVIA-UD350 (P5). VC-Class summary (floor C/E/F vs platform F/F/G), UD350 internal-program Z/X/Y captures, and octave-band floor vs isolation-top plots. Word decorative header bitmap (image1) omitted from publication; Reference uses the standard VC criteria markdown table only.
Institute for Basic Science (IBS) NIKON SMZ745 UD350 P10 Performance Report (April 2019)
Performance worksheet dated April 18, 2019 (April 17, 2019 site visit): UD350 vibration isolation supporting NIKON_SMZ 745 at the Institute for Basic Science 2nd-floor analysis laboratory. VC-Class summary table (floor vs isolator top) under stated conditions, UD350 internal-program Z/X/Y screenshots, and octave-band plots (floor vs isolator top plate). Decorative title-block raster from the DOCX is omitted from publication.
Institute for Basic Science (IBS) NIKON_DS-Qi2 UD350 P11 Performance Report (April 2019)
Performance worksheet dated April 18, 2019 (April 17, 2019 site visit): UD350 vibration isolation supporting NIKON_DS-Qi2 at the Institute for Basic Science 2nd-floor analysis laboratory. VC-Class summary table (floor vs isolator top) under stated conditions, UD350 internal-program Z/X/Y screenshots, and octave-band plots (Floor vs isolator top). Decorative title-block raster from the DOCX is omitted from publication.