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Installation Report
DVIA-ULF Series
11-30-2020

Lemoneyex Bruker SNE-4500M Plus DVIA-L Vibration Measurement Report (P20)

DVIA-L
DVIA-U Series
Installation Report
Lemoneyex
Bruker
SNE-4500M Plus
SEC
Vibration Measurement
201130
P20

Contents

레모넥스_UD350_ P20

Site checklist

Target equipmentBruker_SNE-4500M Plus
Place of installation레모넥스 4층
RemarkGood Performance
END USER레모넥스

Operator and dates

Operator: Choi, Hyoung Mun Date of setup : 20.11.30 Date of reporting : 20.11.30Date of business trip : 17.12.27~17.12.29

Overview

After Active mounting, measure the vibration environment to check that there is no problem in using the equipment. Measurement date: 2020.11.18 (WED), Operator: Daeil System, Manager Choi, Hyoung Mun Place of measurement : 레모넥스 4층 Equipment Model: Bruker_SNE-4500M Plus Measurement conditions and results - DAQ System : B&K PULSE 14 & LAN-XI Type 3056 - Accelerometer : PCB PIEZOTRONICS 393B05 - Frequency Range : 0.7 ~ 200Hz Summary of measurement results Good omnidirectional performance.

Measurement summary (VC-Class)

Test ConditionVC-Class
Z
FloorD
Above ActiveF

UD350 internal program performance measurement result

Z axis (internal program)

X axis (internal program)

Y axis (internal program)

Octave Band Result (BASE: Floor, TOP: Above Active)

Z axis (octave band)

X axis (octave band)

Y axis (octave band)

Reference

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

*Notes:*

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-ULF Series
Date11-30-2020
Tags
DVIA-L
DVIA-U Series
Installation Report
Lemoneyex
Bruker
SNE-4500M Plus
SEC
Vibration Measurement
201130
P20

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