Lemoneyex SN3-4500M Plus UD350 Vibration Measurement Report (2020-10-14)

DVIA-UD350

DVIA-U Series

Installation Report

Lemoneyex

Vibration Measurement

B&K PULSE

SN3-4500M Plus

201014

Measurement location

장소 – 레모넥스 기업부설연구소 4층

측정일: 2020.10.14 (월), 측정자: 대일시스템 김두현 과장, 노문호 주임

측정 위치 – UD350 제진대 상부 및 바닥에서 진동 측정

4. 진동 측정 장비

DAQ System : B&K PULSE 14 & LAN-XI Type 3056

Accelerometer : PCB PIEZOTRONICS 393B05

Frequency Range : 0.7 ~ 200Hz

VC-CLASS 그래프 – Target Equipment : SN3-4500M Plus

5. 측정 결과 보고

6. 비고

전 축 제진성능 양호함.

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A