Vibration Isolation Case Studies

DVIA-ML1000 installation report (serial 240821R5) for Unisoki Low Temperature SPM USM1200 at Yonsei University Quantum Imaging Laboratory, Advanced Science and Technology Research Building. Tuning and vibration measurement on November 19, 2024; report dated November 21, 2024. Engineer Chaewon Lee (DAEIL SYSTEMS). Equipment status: 장비 설치 및 IDLE. Brüel & Kjær LAN-XI DAQ Type 3050 and PCB 393B05 accelerometer; measurement setup 200 Hz span, 800 lines, Hanning, m/s. Conclusion states all axes meet the vibration specification and notes amplification in some bands is inherent USM1200 vibration. Measurement summary PASS all axes. Published plots: vibration specification UI, VC / Autospectrum / Transmissibility for Vertical, Left to Right, and Front to Back, plus equipment photo. Reference uses the standard Generic Vibration Criteria markdown table only (no separate reference graphic).

DVIA-MB3000 (serial 141104R5) inspection and tuning after relocation to Korea Electronics and Machinery Convergence Technology Institute, Room 104, with measurement on 31 Oct 2024 and report dated 15 Nov 2024. Equipment not yet installed; VC-curve, autospectrum, and transmissibility plots for vertical, left-to-right, and front-to-back axes; measurement summary per the site worksheet; equipment vibration specification TBD (미정). Engineers Chae-won Lee (field) and Dong-hwan Kim (domestic sales), DAEIL SYSTEMS. Reference uses the standard Generic Vibration Criteria markdown table (no separate reference figure).

DVIA-MB3000 (serial 171201R2) on-site vibration worksheet dated 2024.11.11 at Tier-1 Semiconductor with upper-platform equipment Turned off: passive setting, active tuning, and vibration measurements. VC-curve plots for floor vs platform (passive control off and DVIA-MB3000 Active On), measurement summary table, equipment vibration specification diagram, and Reference as a markdown Generic Vibration Criteria table (no separate reference figure). Engineer Jung Sung-yoon (DAEIL SYSTEMS); report written 2024.11.18.

Shenzhen Weiguang — Thermo Fisher Spectra 300 S/TEM with DVIA-STONE-300 internal program performance screenshots (Vertical, Left to Right, Front to Back) from the 2024.11.05 measurement; reporting dated 2024.11.06. Facility photograph from the worksheet before the summary table is included. Engineer Chaewon Lee (DAEIL SYSTEMS).

DVIA-ML1000 installation report — ZEISS FE-SEM GeminiSEM 560 (serial 240925R4) at a Tier-1 fab DSR laboratory. Overview and bus-related measurement context per the report. Equipment Status: Equipment installed and IDLE. Vibration specification as published screenshot; measurement setup text; Tuning Request N/A; conclusions for Active, Passive, and isolator-off states; three measurement-summary tables; VC / Autospectrum / Transmissibility plots for Active and Passive, and VC / Autospectrum for Turned off where the report omits transmissibility curves. Generic Reference vibration criteria as a markdown table (embedded reference figure omitted).

DVIA-ML1000 installation report (serial 240709R2) for ZEISS FE-SEM GeminiSEM 460 at Tier-1 Semiconductor Cheonan campus C5 building. Korean handout: tuning and vibration measurement on October 24, 2024; report written October 29, 2024. Equipment condition: 장비 설치 및 IDLE. Brüel & Kjær LAN-XI DAQ and PCB 393B05 accelerometer. Manufacturer equipment vibration specification as embedded figure; UI-program VC, Autospectrum, and Transmissibility by axis; onsite equipment photo; Reference uses the standard Generic Vibration Criteria markdown table only (no separate reference graphic).