Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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Henkel Hitachi SU3800 SEM DVIA-ML1000 (250423R3) Installation Report
DVIA-ML1000 installation report — Hitachi SEM SU3800 (serial 250423R3) at Henkel Adhesive Technologies India Private Limited, 6th floor SEM room. Overview states the DVIA-ML1000 functions properly as intended. The report embeds distinct figures under Vibration Specification and under each Data & Images subheading on the form sequence: Narrow Band displacement plots (“Vibration (Narrow Band)”), VC-referenced velocity “Vibration” plots by axis, and transmissibility by axis from the measurement software; onsite equipment portrait; Generic Vibration Criteria table as Reference.

LSU Thermo Fisher S/TEM Spectra 200 Installation Report
DVIA-ML3000 installation report for LSU with Thermo Fisher Scientific S/TEM (model as listed in the report). Published measurement graphics: transmissibility plots per axis.

Jeonbuk National University Raith Voyager DVIA-ML3000 Installation Report
DVIA-ML3000 installation report at Jeonbuk National University with Raith Voyager electron beam lithography. Published graphics include vibration specification capture, VC/autospectrum/transmissibility plots per axis, and equipment photo.
Tier-1 Semiconductor Cheongju M11 ZEISS X-ray Microscope Xradia 630 Versa DVIA-ML3000 (250225R2) Installation Report
DVIA-ML3000 installation report (serial 250225R2) for ZEISS X-ray Microscope Xradia 630 Versa at Tier-1 Semiconductor Cheongju 3 Campus M11. March 31, 2025 tuning and vibration measurement; report written April 1, 2025. Equipment condition 장비 Turned on/IDLE. Manufacturer vibration limits via specification capture; VC / Autospectrum / Transmissibility plots by axis. Conclusion notes all axes meet specification and attributes somewhat lower measured high-frequency performance to internal motor-related vibration influences. Reference uses the standard Generic Vibration Criteria markdown table only (no separate reference graphic).

DVIA-ML1000 (241107R5) Installation Report
DVIA-ML1000 installation report (serial 241107R5).

DVIA-ML1000 (241223R3) Installation Report
DVIA-ML1000 installation report (serial 241223R3).