Installation Report

DVIA-M Series

05-19-2025

Henkel Hitachi SU3800 SEM DVIA-ML1000 (250423R3) Installation Report

DVIA-M Series

Installation Report

Henkel

Henkel Adhesive Technologies

India

Hitachi

SEM

SU3800

DVIA-ML1000

Overview

DVIA-ML1000 functions properly as intended.

Vibration Isolation System Information

Model: DVIA-ML1000

Serial Number: 250423R3

Engineer

Jonghwa Suh from Daeil Systems

Date of Measurement

May 19, 2025

Tuning Date

May 19, 2025

Report written date

May 19, 2025

End User

Henkel Adhesive Technologies

Installation Site

Henkel Adhesive Technologies India Private Limited, 6th floor, SEM room

Equipment Condition

Equipment installed / Turned off

Equipment

Manufacturer: Hitachi

Equipment: SEM

Model: SU3800

Measuring Equipment

9.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

9.2) Accelerometer

PCB Accelerometer

Model: 393B05

Vibration Measurement Setup

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Vibration specification

Conclusion

The measured data meets the vibration specifications in all directions.

Measurement Summary

Place of Measurement	Status	Direction	Floor	DVIA-ML1000
Henkel Adhesive Technologies SEM room 1. Floor 2. DVIA-ML1000	Equipment Installed/Turned off	Vertical	VC-E @16 Hz	VC-G @16 Hz
		Left to Right	VC-D @1.6 Hz	VC-G @1.6 Hz
		Front to Back	VC-C @2.5 Hz	VC-G @2.5 Hz

Measurement Data Obtained via UI Program

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)
Residential Area (ISO)	Barely perceptible vibration. Appropriate for sleep areas in most instances. Usually adequate for computer equipment. hospital recovery rooms. semiconductor probe test equipment. and microscopes less than 40x.	200 (8,000)
Operating Theatre (ISO)	Vibration not perceptible. Suitable in most instances for surgical suites. microscopes to 100x and for other equipment of low sensitivity.	100 (4,000)
VC-A	Adequate in most instances for optical microscopes to 400x. microbalances. optical balances. proximity and projection aligners. etc.	50 (2,000)
VC-B	Appropriate for inspection and lithography equipment (including steppers) to 3μm line widths.	25 (1,000)
VC-C	Appropriate standard for optical microscopes to 1000x. lithography and inspection equipment (including moderately sensitive electron microscopes) to 1μm detail size. TFT-LCD stepper/scanner processes.	12.5 (500)
VC-D	Suitable in most instances for demanding equipment. including many electron microscopes (SEMs and TEMs) and E-Beam systems.	6.25 (250)
VC-E	A challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path. laser based. small target systems. E-Beam lithography systems working at nanometer scales. and other systems requiring extraordinary dynamic stability.	3.12 (125)
VC-F	Appropriate for extremely quite research spaces: generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion. only for evaluation.	1.56 (62.5)
VC-G	Appropriate for extremely quite research spaces: generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion. only for evaluation.	0.78 (62.5)

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Case Study Information

Henkel Hitachi SU3800 SEM DVIA-ML1000 (250423R3) Installation Report

Contents

Overview

Vibration Isolation System Information

Engineer

Date of Measurement

Tuning Date

Report written date

End User

Installation Site

Equipment Condition

Equipment

Measuring Equipment

Vibration Measurement Setup

Vibration specification

Conclusion

Measurement Summary

Measurement Data Obtained via UI Program

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Reference

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Case Study Information

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