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Installation Report
DVIA-M Series
03-28-2025

DVIA-ML1000 (241107R5) Installation Report

DVIA-M Series
Installation Report
DVIA-ML1000
241107R5

Contents

Overview

N/A

Vibration Isolation System Information

Model: DVIA-ML1000

Serial Number: 241107R5

Engineer

이채원

Tuning Date

25.02.24

Report written date

25.03.28

End User

N/A

Number of Tuning Trial

N/A

Location

N/A

Equipment

Manufacturer: N/A

Equipment: N/A

Model: DVIA-ML1000

Equipment Condition

장비 설치 및 Turned on/IDLE

Measurement Summary

측정 장소상태방향측정값
FloorDVIA-ML1000
Tier-1 Semiconductor 화성 12라인 4층 연구실
1. Floor
2. DVIA-ML1000		장비 설치/IDLEVerticalVC-A @ 8 HzVC-F @ 8 Hz
Left to RightVC-B @ 3.15 HzVC-G @ 3.15 Hz
Front to BackVC-C @ 2.5 HzVC-G @ 2.5 Hz

Data and Image

Vertical VC Curves

Vertical VC Curves

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
µm/s (µin/s)		Detail Size
µm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date03-28-2025
Tags
DVIA-M Series
Installation Report
DVIA-ML1000
241107R5

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