Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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Changping P3 Laboratory Thermo Fisher Arctis Cryo-Plasma FIB-SEM DVIA-ML1000 (250715R9) Installation Report
DVIA-ML1000 installation report at Changping P3 Laboratory — Thermo Fisher Scientific Cryo-Plasma FIB-SEM Arctis (serial 250715R9). Vertical, left-to-right, and front-to-back transmissibility plots, tuning-request capture, and on-site equipment photo.
DVIA-ML1000 (241016R7) Installation Report
DVIA-ML1000 installation report (serial 241016R7).

STATSCHIPPACK Korea TESCAN SOLARIS X FIB-SEM DVIA-ML1000 (250824R1) Installation Report
DVIA-ML1000 installation report — TESCAN SOLARIS X FIB-SEM (serial 250824R1) at STATSCHIPPACK Korea laboratory. Overview describes tuning and vibration measurement, equipment-mounted nested isolator with airflow and vibration from the tool. Vibration limits 10 µm/s (<30 Hz) and 20 µm/s (>30 Hz); measurement setup with Data Physics QUATTRO and PCB 393B05. Measurement summary PASS all axes; VC curves, Autospectrum, and Transmissibility per axis.

Tsinghua McGovern ZEISS MultiSEM FIB-SEM DVIA-MB1000 (250810R1-1) Installation Report
DVIA-MB1000 installation tuning for ZEISS MultiSEM FIB-SEM at Tsinghua McGovern (serial 250810R1-1). Tuning-request UI, vertical and horizontal transmissibility plots, and on-site equipment photo.

Korea Institute of Science and Technology (KIST) TESCAN Amber X DVIA-MB1000 Installation Report — 2025.10.28
DVIA-MB1000 (SN 210112R6) tuning and vibration measurement at KIST L0 Building 1F laboratory for a TESCAN Amber X FIB-SEM. Engineer Chaewon Lee (DAEIL SYSTEMS); measurement 2025-10-27; report written 2025-10-28. Includes equipment manufacturer specification diagram, VC / autospectrum / transmissibility plots per axis, site equipment photo, and Generic Vibration Criteria as the standard markdown table (TESCAN header banner and Word reference EMF omitted).

Institute of Microsystems Thermo Fisher Scientific Talos F200 DVIA-M3000 (250708R7) Installation Report
DVIA-M3000 (250708R7) installation report at the Institute of Microsystems with a Thermo Fisher Scientific Talos F200 TEM: tuning request capture, transmissibility results for vertical, left-to-right, and front-to-back axes, equipment photo, and generic vibration criteria as a markdown table.