YIMO Beijing University of Aeronautics and Astronautics Unisoku STM DVIA-ML1000 (250730R1-2) Installation Report

DVIA-M Series

Installation Report

YIMO

BUAA

Unisoku

STM

DVIA-ML1000

Overview

The DVIA-ML1000 active vibration isolation platform is appropriately installed and functioning as intended.

Model: DVIA-ML1000

Serial Number: 250730R1-2

Chaewon Lee DAEIL SYSTEMS

December 1, 2025

December 5, 2025

Beijing University of Aeronautics and Astronautics

1st

Beijing, China

Manufacturer: Unisoku

Equipment: STM

Model: N/A

The equipment is installed/IDLE

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A