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Installation Report
DVIA-M Series
01-07-2026

YIMO Unisoku STM DVIA-ML1000 (250331R2) Installation Report

DVIA-M Series
Installation Report
YIMO
Unisoki
STM
DVIA-ML1000
250331R2

Contents

Prepared by

Engineer: Chaewon Lee

Tuning date: 26.01.07

Report written date: 26.01.07

Overview

Oscillation occurred, and re-tuning of the vibration isolation table was performed.

After completion of the tuning, stable operation of the DVIA-ML1000 was confirmed, and the STM image quality was verified to be good

Vibration Isolation System Information

Model: DVIA-ML1000

Serial Number: 250331R2

Engineer

Chaewon Lee DAEIL SYSTEMS

Tuning Date

January 7, 2026

End User

N/A

Number of Tuning Trial

3rd

Location

N/A

Equipment

Manufacturer: Unisoku

Equipment: STM

Model: N/A

Vibration Specification

N/A

Equipment Condition

The equipment is turned on/IDLE

Tuning Request

N/A

Measurement Data Obtained via UI Program

Vertical Autospectrum

Vertical Transmissibility

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date01-07-2026
Tags
DVIA-M Series
Installation Report
YIMO
Unisoki
STM
DVIA-ML1000
250331R2

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