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Installation Report
DVIA-M Series
12-12-2025

YIMO Beijing University of Aeronautics and Astronautics Unisoku STM DVIA-ML1000 (250730R1-1) Installation Report

DVIA-M Series
Installation Report
YIMO
BUAA
Unisoku
STM
DVIA-ML1000

Overview

On December 3, 2025, an issue with the Z-axis VCM was identified during tuning, and a follow-up inspection was conducted on December 11, 2025.

As a result of the inspection, the Z2 VCM was found to be faulty, and the Z3 and Z4 VCMs were configured with reversed output polarity.

As an interim measure, the Z2 VCM was turned off, and tuning was performed after reversing the sign of the output matrix for the Z3 and Z4 VCMs.

After tuning, slight performance degradation was observed in the horizontal axes, but the overall performance was measured to be acceptable

Full performance is expected only after the issues with the Z2, Z3, and Z4 VCMs are fully resolved.

Vibration Isolation System Info

Model: DVIA-ML1000

Serial Number: 250730R1-1

Engineer

Chaewon Lee DAEIL SYSTEMS

Tuning Date

December 11, 2025

Report written date

December 12, 2025

End User

Beijing University of Aeronautics and Astronautics

Number of Tuning Trial

2nd (1st: 25.12.03)

Location

Beijing, China

Equipment

Manufacturer: Unisoku

Equipment: STM

Model: N/A

Equipment Condition

The equipment is installed/IDLE

Tuning Request

Data and Image

Vertical Transmissibility

Left to Right Transmissibility

Front to Back Transmissibility

Equipment picture

Reference

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date12-12-2025
Tags
DVIA-M Series
Installation Report
YIMO
BUAA
Unisoku
STM
DVIA-ML1000