Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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Thermo Fisher Helios 5CX FIB-SEM DVIA-ULF1000 Installation Report
(End User Citic Metal, Beijing, China) Thermo Fisher Scientific FIB-SEM Helios 5CX DVIA-ULF1000 installation report — after installation, tuning and vibration measurement were performed with the equipment in the IDLE state and represented in VC Curve format against the VC-F specification. On the DVIA-ULF1000 platform all three axes (Vertical, Left-to-Right, Front-to-Back) passed; on the floor all three axes failed. The tuning request capture, per-axis VC Curves, and an installation photo are published.

Korea Institute of Science and Technology TESCAN Clara FE-SEM DVIA-ULFB700 Installation Report
Korea Institute of Science and Technology (Building L0, Room 184) TESCAN Clara FE-SEM DVIA-ULFB700 installation report — a revisit inspection prompted by upper-door open/close noise. The noise was traced to the spring contacting the top-plate groove with no impact on performance, and all X/Y/Z axes met the required vibration specification. Per-axis Autospectrum and VC curves are published.

Coxem Schottky Field Emission SEM DVIA-ULFB700 Installation Report
Coxem (Coxem Technology Research Institute, 5th floor) Schottky Field Emission SEM (FX-2000) DVIA-ULFB700 installation report. After installation, tuning and vibration measurement were performed with the equipment Turned on/IDLE. On the isolated DVIA-ULFB700 platform, all X/Y/Z axes met the required VC-E specification. Per-axis Autospectrum and VC curves plus the installation photo are published.

J&L Tech Residual Stress Measurement System DVIA-ULF1500 Installation Report
J&L Tech (development lab, Ansan branch) residual stress measurement system DVIA-ULF1500 installation report. After installation, tuning and vibration measurement were performed with the equipment installed and Turned On. On the floor all three axes measured at the VC-C level, while on the DVIA-ULF1500 platform the vertical (Z) axis reached VC-G and the left-to-right (X) and front-to-back (Y) axes reached VC-E. Per-axis Autospectrum and VC Curves plus the installation photo are published.

Coxem Schottky Field Emission SEM DVIA-ULFB700 (260423R1-1) Installation Report
Coxem (research institute demo room) Schottky Field Emission SEM (FX-2000) DVIA-ULFB700 installation report, serial 260423R1-1. After installation, tuning and vibration measurement were performed in the IDLE state against a VC-E requirement. On the floor the vertical (Z) and left-to-right (X) axes exceeded VC-E while the front-to-back (Y) axis was already within it; on the isolated DVIA-ULFB700 platform all three axes passed, and SPEC-In was confirmed. Per-axis VC Curves and Autospectrum plots are published.

Shanghai Institute of Technical Physics DVIA-UB700 (180927R1) Installation Report
DVIA-UB700 (S/N 180927R1) vibration worksheet at Shanghai Institute of Technical Physics (SITP), 1st floor site. Setup 18.12.19; measurement 2018.12.19; report written 18.12.26 per worksheet. Posts VC-Class floor vs Above Active summary and MB1000 internal-program plus octave-band (Floor vs Above Active) Z/X/Y plots; decorative title-block images (media/image1, image2) omitted.