Vibration Isolation Case Studies

DVIA-ULF700 installation report (serial 260827R1) for a ZEISS EVO 10 SEM at End User Hebei Hengke Vibration Damping Equipment Co., Ltd. in Hebei. Tuning was carried out on 2026.09.14 and vibration was measured with the equipment in the IDLE state at two points, the installation floor and the top surface of the DVIA-ULF700. All three axes (Vertical, Left to Right, Front to Back) passed the specified vibration criterion at both measurement points, the floor and the DVIA-ULF700. Published figures: the tuning request work order, the per-axis Autospectrum traces captured from the UI program, and one installation photo.

Tier-1 Semiconductor Cheonan (C3 line, 6th floor mass production quality team cleanroom) ZEISS Xradia 730 Versa X-ray microscope DVIA-ULF1500 installation report. After relocation and installation, tuning and vibration measurement were performed with the equipment powered on and active isolation running. At the central point between the two ULF modules the floor vibration was reduced within the VC-C grade on all axes. Per-axis VC Curves are published.

DVIA-ULF700 installation report (serial 260528R9) for a ZEISS FE-SEM Sigma360 at End User School of Life and Health Sciences, Hainan Normal University in Haikou. Tuning was carried out on 2026.09.11 and vibration was measured with the equipment in the IDLE state at two points, the installation floor and the top surface of the DVIA-ULF700. All three axes (Vertical, Left to Right, Front to Back) passed the specified vibration criterion at both measurement points, the floor and the DVIA-ULF700.

DVIA-ULF700 installation report (serial 260605R5) for a ZEISS Sigma360 FE-SEM at End User Inner Mongolia Xingfa Technology Co., Ltd. in Wuhai. Tuning was carried out on 2026.09.04 and vibration was measured with the equipment in the IDLE state at two points, the installation floor and the top surface of the DVIA-ULF700. At the floor all three axes failed the specified criterion; on the DVIA-ULF700 all three axes (Vertical, Left to Right, Front to Back) satisfied the ZEISS specification, confirming that the isolator attenuates the ambient vibration. Published figures: the tuning request work order, the per-axis Autospectrum traces captured from the UI program, and one installation photo.

Installation report for the DVIA-ULFB700 vibration isolation platform (S/N 260707R4) supporting an Attocube AttoDRY 2100 cryostat in Room L02, Building 2 of the Electronics and Telecommunications Research Institute (ETRI). Tuning and vibration measurement were performed with the equipment in the IDLE state against a 3.125 µm/s RMS (VC-E) requirement in both the horizontal and vertical directions. On the floor all three axes failed the requirement, while on the isolated DVIA-ULFB700 platform all three axes passed: after the first round of tuning the vertical axis reached VC-F and the horizontal axes reached VC-E. Per-axis VC Curves for the Z, X and Y axes are published.

DVIA-ULF700 installation report (serial 260511R3) for a ZEISS Sigma 360 FE-SEM at End User Jiechuang Trading in Shanghai, China. Tuning was carried out on 2026.08.20 and vibration was measured with the equipment in the Idle state at two points, the installation floor and the top surface of the DVIA-ULF700. The floor failed the vertical criterion while both horizontal axes passed; on the DVIA-ULF700 all three axes (Vertical, Left to Right, Front to Back) satisfied the ZEISS specification, confirming that the isolator fully attenuates the vertical exceedance present in the site. Published figures: the tuning request work order, the per-axis Autospectrum traces captured from the UI program, and two installation photos.