Vibration Isolation Case Studies

DVIA-ML1000 installation report (serial 250331R2) for Unisoku STM — 3rd tuning on January 7, 2026 after oscillation and re-tuning. Engineer Chaewon Lee (DAEIL SYSTEMS). End User and Location N/A on the form; equipment model field N/A. Vibration Specification N/A; equipment condition The equipment is turned on/IDLE; Tuning Request N/A. Published UI-program autospectra and transmissibility (vertical, left-to-right, front-to-back) and equipment photo. No measurement summary table or VC curves on the form. Reference uses the standard Generic Vibration Criteria markdown table only.

DVIA-ML1000 installation report — ZEISS Crossbeam 350 FIB-SEM (serial 250806R2). Overview states the platform is appropriately installed and functioning as intended. Vibration-spec UI capture under Vibration Specification; Prepared for / End User / Location N/A. Manufacturer line in the report form reads ZEIS. Equipment Condition Turned on/IDLE; Tuning Request N/A. UI-program Autospectrum and Transmissibility per axis and equipment photo.

DVIA-ML1000 installation report — Ciqtek SEM5000X (251113R6). The active vibration isolation platform is appropriately installed and functioning as intended. Measurements with SEM5000X Turned on / IDLE; vibration specification N/A on the form; measurement summary compares floor vs on DVIA-ML1000 at dominant frequencies. UI-program plots and equipment photo.

DVIA-ML3000 installation report (serial 250917R1) for the ZEISS X-ray microscope Versa Xradia 630 Versa at Tier-1 Semiconductor Cheonan campus C5 Analysis Room 3. Tuning and vibration checks ran with the tool Turned On / IDLE; vibration curves are omitted from the customer-facing report under export restrictions, but the published equipment vibration specification capture from the handout is included. Reference uses the standard Generic Vibration Criteria markdown table only.

Tier-1 Semiconductor Cheonan C5 — ZEISS Versa Gemini SEM 460 on DVIA-ML1000 (SN 251015R4). Per customer data-handling policy, the public case is text only: no measurement plots and no report imagery.

DVIA-ML3000 (250903R5) installation report at Tier-1 Semiconductor Icheon campus P&T1 — ZEISS X-ray Microscope Versa 730. Equipment specification diagram from the report UI; VC / Autospectrum / Transmissibility for vertical, left-to-right, and front-to-back; standard vibration criteria as a markdown table.