Installation Report

DVIA-M Series

01-07-2026

YIMO Ciqtek SEM5000X DVIA-ML1000 (251113R6) Installation Report

DVIA-M Series

Installation Report

YIMO

Ciqtek

SEM5000X

DVIA-ML1000

Overview

The DVIA-ML1000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Info

Model: DVIA-ML1000

Serial Number: 251113R6

Engineer

Chaewon Lee, DAEIL SYSTEMS

Tuning Date

December 16, 2025

Report written date

January 7, 2026

End User

N/A

Number of Tuning Trial

1st

Location

N/A

Equipment

Manufacturer: Ciqtek

Equipment: SEM

Model: SEM5000X

Vibration specification (field form)

N/A

in the field report. Measurement data in the measurement summary and plots below are interpreted against generic VC context in Reference.

Equipment condition

Turned on / IDLE

during the reported measurement.

Tuning request

N/A

Measurement Summary

Status	Axis	Floor	On DVIA-ML1000
SEM5000X is turned on/IDLE	Vertical	VC-B @ 4 Hz	VC-G @ 4 Hz
	Left to Right	VC-C @ 2.5 Hz	VC-G @ 2.5 Hz
	Front to Back	VC-C @ 2.5 Hz	VC-G @ 2.5 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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