Vibration Isolation Case Studies

DVIA-ML1000 installation report (serial 241016R4) for Hitachi SU3800 SEM. Overview states the platform is appropriately installed and functioning as intended. Prepared for and location are N/A on the form; measurement summary compares floor vs DVIA-ML1000 with equipment turned on/IDLE. Vibration specification is given as a diagram; tuning request N/A; UI-program VC, autospectrum, and transmissibility plots per axis; equipment photo; Reference uses the standard Generic Vibration Criteria markdown table.

DVIA-ML3000 installation report (serial 250211R4-1) for Thermo Fisher Scientific Cryo-STEM Spectra 200 at Gränges Aluminum, Shanghai, China. Overview states the platform is appropriately installed and functioning as intended. Vibration specification as text table; tuning request N/A; measurement summary compares floor vs DVIA-ML3000 with equipment turned on/IDLE; UI-program VC, autospectrum, and transmissibility plots per axis; equipment photo; Reference uses the standard Generic Vibration Criteria markdown table only.

TFS Helios 5 on DVIA-ML1000 (250904R2) — see report for HWL / VC spec summary.

DVIA-ML3000 (serial 251111R3) at Korea Institute of Nano Technology, 1F QRT lab, for customer QRT, supporting a Thermo Fisher Scientific Cryo-TEM Spectra 200. Measurement date 26.03.04, report date 26.03.05; engineer 이채원. Tuning and measurement were performed with the customer equipment Turned on/IDLE. Data Physics QUATTRO DAQ with SignalCalc ACE and a PCB 393B05 accelerometer; VC / Autospectrum / Transmissibility plots for vertical, left-to-right, and front-to-back; equipment specification and seven installation photos as published figures; measurement summary table; Reference as a markdown Generic Vibration Criteria table.

Tier-1 Semiconductor Pyeongtaek P1 1F — ZEISS Gemini SEM 460 on DVIA-ML1000. Includes manufacturer equipment-vibration spec diagram, VC/Autospectrum/Transmissibility.

AID Robotics 1F — DVIA-ML1000S and DVIP-B (SN 260108R1).