Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
Series
Equipment Type
Manufacturer
All Case Studies
Helios G5 CX DVIA-M1000 Report (221107R1 — GRGT, Shanghai, 2023-04-07)
GRGT field report for Helios G5 CX in Shanghai. DVIA-M1000 (reference 221107R1): overview and MB1000 internal program performance plots for Z, X, and Y.
Sigma 300 DVIA-UB700 (221103R3) Installation Report — Shanghai Shengjian Environmental System Technology
DVIA-UB700 installation worksheet (serial 221103R3) for Shanghai Shengjian Environmental System Technology Co., Ltd with Thermo Scientific Sigma 300 equipment in Shanghai, China. Tuning date 23.03.20, report written 23.04.06, business trip 17.12.27~17.12.29. Publication includes Z / X / Y-axis transmissibility plots and equipment photograph; decorative header bitmap (image1) omitted.
CIQTEK DVIA-T86 (210818R3-2) Installation Report
DVIA-T86 (serial 210818R3-2) installation report prepared for CIQTEK covering Heifei, China, tuning on May 21, 2023, and VC-curve summaries for Floor vs Active vibration at Z/X/Y axes. Report publishes Z-, X-, and Y-axis transmissibility and VC-curve plots (vertical, left–right, front–back) for the Experimental platform installation; DOCX decorative header raster is omitted from the public gallery.
GWM SU8600 DVIA-ML1000 Installation Report (2023-03-30)
JIANGSU — SU8600 on DVIA-ML1000 (SN 220629R1). Compact internal-program summary with Z / X / Y axis plots.
Hua Hong Semiconductor (Wuxi) ASML eScan500 DVIA-P4000 (221227R2) Installation Report
DVIA-P4000 (serial 221227R2) setup and vibration measurement at Hua Hong Semiconductor (Wuxi) for ASML eScan500. Setup 2023.03.22–23; report 2023.03.27. Summary VC-grade table (equipment off/on) and Z/X/Y octave-band velocity and acceleration RMS graphs.
YIMO China business trip report — DVIA-T65 service and DVIA-P4000 setup at Tier-1 Semiconductor (March 2023)
Business trip report dated 2023.03.27 by Hosang Yu and Youngha Lee (2023.03.20–03.24): DVIA-T65(220210R1-1) limit-switch repair, transmissibility, and VC-class vibration measurement at YIMO Tech Office (Wuxi); DVIF-FA-P4000-2800x1450x600H(221227R2) setup, feedforward tuning, resonance investigation, cable-routing mitigation, factory-test comparison, and multi-condition PULSE data at Tier-1 Semiconductor (Wuxi) with ASML eScan500 and IDE Active isolator stack. Conclusions and IDE ATAN module notes follow the source worksheet order.