Vibration Isolation Case Studies

DVIA-M-JT2 worksheet from DOCX M-JT2_220126R7-4_24.07.05: target equipment JEOL EA1400; END USER Sun Yat-sen University; installation place GUANGDONG; setup 24.04.11 and reporting 24.07.05; operator Chaewon Lee; overview block includes tuning focus on stability, measurement date 2024.04.11 (Thursday), operator Chaewon Lee from DAEIL SYSTEMS, place GUANGDONG, manufacturer JEOL, equipment TEM, model EA1400. Internal program section publishes Vertical, Left to Right, and Front to Back plots only; this document revision has no decorative header embeds in word/media before those plots.

Abbreviated DVIA-M1000 worksheet (serial 220603R4) for ZEISS GeminiSEM 360. Setup 23.08.09, reporting 24.07.05; measurement 2023.08.09 with operator Chaewon Lee (DAEIL SYSTEMS). Place of installation, END USER, and place of measurement are blank in the source and are published as N/A. No vibration specification, measurement summary table, or Reference section appears in the source. Internal-program plots are labeled Vertical, Left to Right, and Front to Back.

DVIA-M1000 set-up report (serial 230111R6) for ZEISS Sigma500 SEM. Internal program performance plots (vertical, left–right, front–back).

DVIA-MB1000 abbreviated worksheet (serial 230501R4). Setup dated 23.11.15 and reporting dated 24.07.05; measurement date 2023. 11.15 (Wednesday) with operator Chaewon Lee from DAEIL SYSTEMS. Site checklist fields Target equipment, Place of installation, and END USER are N/A on the form (dash in the source). The Overview uses the source DVIA-MB1000 wording. There is no vibration specification, equipment status, tuning request, measurement summary table, or Reference section in the source. The section title reads “M1000 internal program performance measurement result”; published figures are three plots under Vertical, Left to Right, and Front to Back.

DVIA-MB1000 installation report (serial 230512R3) for a JEOL JSM-IT800 FE-SEM delivered by Tier-1 Semiconductor in Ningbo, China. Tunings on May 28, 2024 were the second trial (first: 2023.08.23). Written by is N/A; vibration spec is N/A on the form; conclusion states the platform is appropriately installed and functioning. Published plots are transmissibility per axis, one equipment photo, and the standard VC reference as a markdown table.

DVIA-M-JSA (serial 230512R3) internal-program performance screenshots for Ningbo SMIC with ZEISS Sigma 300 VP target SEM and JEOL IT800 SEM fields on the issued Word form. Includes installation imagery after the M-JSA set-up line and Vertical / Left to Right / Front to Back curves from the M-JSA UI. The published outline follows headings present in the source file (no Measurement Summary or vibration-spec section).