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Vibration Isolation Case Studies

DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.

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184 case studies
NAURA Technology Group Beijing TESCAN CLARA FE-SEM DVIA-ULF700 (250902R6) installation report — 2026-04-13

DVIA-ULF700 (serial 250902R6) retuning report: TESCAN CLARA FE-SEM in Beijing, China, end user NAURA Technology Group. 2nd tuning (1st 2025-12-10); tuning and report date 2026-04-13. Publishes vibration-specification diagram, tuning-request UI capture, nine-axis VC / autospectrum / transmissibility plots, RMS measurement summary with pass/fail, and markdown VC reference (EMF omitted).

East China University of Science and Technology ZEISS Sigma 360 DVIA-ULF700 Installation Report

DVIA-ULF700 (S/N 251224R5) active vibration isolation platform installation report for a ZEISS Sigma 360 FE-SEM at East China University of Science and Technology (Shanghai, China). Vibration specification and tuning-request program captures, nine-axis UI plots (VC, Autospectrum, Transmissibility), and equipment photographs. Floor measurements FAIL vs PASS on isolator per the report summary table.

Nanjing Hangpu ZEISS Sigma 360 DVIA-ULF700 Installation Report
Installation Report
DVIA-ULF Series
04-08-2026

Nanjing Hangpu ZEISS Sigma 360 DVIA-ULF700 Installation Report

Nanjing Hangpu (Nanjing City) ZEISS Sigma 360 DVIA-ULF700 installation report — retuning was performed to restore performance that had degraded, and vibration measurement verified the results. After retuning the Vertical axis passed on the DVIA-ULF700 (FAIL on floor), and Left-to-Right and Front-to-Back passed on both floor and platform. Per-axis Autospectrum data and an installation photo are published.

Tier-1 Semiconductor 1F Analytical Laboratory SEM-Testbed DVIA-ULF700 (250708R1-2) Installation Report

DVIA-ULF700 (serial 250708R1-2) tuning and vibration measurement at a Tier-1 Semiconductor fab 1F analytical laboratory with SEM-Testbed (model line “-” in the report form). Measurement on 2026-03-19; report written 2026-03-20. VC / autospectrum / transmissibility for three axes at Turned on/IDLE on the isolation platform vs floor; all axes VC-G @ 1 Hz per the measurement summary table. Overview notes vibration from the mounted equipment during tuning/measurement. Reference uses the markdown VC criteria table only (no artwork upload).

ZEISS Sigma 360 FE-SEM DVIA-ULF700 Installation Report (retuning after degraded performance)

Report — serial 250923R3, DVIA-ULF700. 2nd tuning (1st Dec 2025). FE-SEM Sigma 360; vibration spec diagram, UI VC / Autospectrum / Transmissibility and equipment photo.

TESCAN Korea Mira XR FE-SEM DVIA-ULFB700 (260212R2-2) Installation Report — 2026.03.13

DVIA-ULFB700 tuning and vibration measurement (serial 260212R2-2) at the TESCAN Korea Demo Room, Rue West City Building B 2F, with FE-SEM Mira XR installed. Engineer Chaewon Lee (DAEIL SYSTEMS); installation and tuning dated 2026-03-12; report dated 2026-03-13. Equipment specification is given as text on the form; nine measurement plots (VC curves, autospectra, transmissibility by axis) are published. The TESCAN slogan banner at the top of the Word file and the reference EMF under 참고자료 are omitted in favor of the standard markdown Generic Vibration Criteria table.