Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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Kunming Metallurgical Research Institute ZEISS Sigma 360 DVIA-ULFB700 Installation Report
Kunming Metallurgical Research Institute Co., Ltd (Kunming) ZEISS Sigma 360 FE-SEM DVIA-ULFB700 installation report — following installation of the DVIA-ULFB700, vibration measurement was performed with the equipment in the IDLE state. The Vertical axis passed on the DVIA-ULFB700 (FAIL on floor), while Left-to-Right and Front-to-Back passed on both floor and platform. Because the ZEISS Sigma 360 specification is defined in acceleration while the data was acquired in velocity, the specification was converted to an equivalent velocity criterion for the pass/fail evaluation. Per-axis Autospectrum data and an installation photo are published.

Greater Bay Area Quantum Center ZEISS Sigma 360 DVIA-ULF700 Installation Report
Greater Bay Area Quantum Center (Guangdong, China) ZEISS Sigma 360 FE-SEM DVIA-ULF700 installation report — after installation, vibration was measured with the equipment in the IDLE state and represented in Autospectrum format. On the DVIA-ULF700 platform all three axes (Vertical, Left-to-Right, Front-to-Back) passed; on the floor the Vertical and Front-to-Back axes failed while Left-to-Right passed. Per-axis Autospectrum data and an installation photo are published.

Greater Bay Area Quantum Center ZEISS Sigma 360 DVIA-ULF700 Installation Report
DVIA-ULF700 (S/N 251110R7) installation report for Greater Bay Area Quantum Center, Shenzhen, China — ZEISS FE-SEM Sigma 360. Vibration specification diagram, UI VC / Autospectrum / Transmissibility plots and equipment photo.

Shenzhen BYD Lithium Battery ZEISS Sigma 360 DVIA-U1000 (250107R2) Installation Report
DVIA-U1000 (S/N 250107R2) retuning and vibration verification for a ZEISS FE-SEM Sigma 360 at Shenzhen BYD Lithium Battery, Shenzhen. Performance had degraded; after retuning the platform performs as intended (tuning May 18, 2026; report written May 21, 2026). Published vibration specification diagram, measurement summary (floor FAIL vertical / platform PASS all axes), nine-axis UI plots, and equipment photo. Decorative header banner and Reference EMF omitted — Reference uses the standard VC markdown table.

Shanghai Opotong Thermo Scientific Axia SEM DVIA-ULFB700 Installation Report
DVIA-ULFB700 (S/N 260202R1-5) installation report for Thermo Fisher Scientific SEM (Axia) at Shanghai Opotong Instruments Co., Ltd. Includes vibration-specification note graphic, VC / Autospectrum / Transmissibility plots from the UI program, equipment photo, and Reference as a VC criteria markdown table (no separate reference bitmap).

Thermo Fisher Axia SEM DVIA-ULFB700 Installation Report
DVIA-ULFB700 installation report (serial 260202R1-5) for a Thermo Fisher Scientific Axia SEM at End User Shanghai Opotong Instruments Co., Ltd. in Shanghai, China. Measured with the equipment turned on/IDLE, the floor read VC-B vertically, VC-E left-to-right and VC-D front-to-back, while the DVIA-ULFB700 platform reached VC-F, VC-G and VC-G on the same axes. Published figures: the vibration specification page from the equipment pre-installation manual, per-axis VC Curves, Autospectrum and Transmissibility captured from the UI program, and an equipment photo.