Installation Report

DVIA-ULF Series

05-14-2026

YIMOTECH Thermo Fisher Axia SEM DVIA-ULFB700 Installation Report

DVIA-ULF Series

Installation Report

YIMOTECH

Shanghai Opotong Instruments

Thermo Fisher Scientific

Axia

SEM

DVIA-ULFB700

260202R1-5

Shanghai

Overview

The DVIA-ULFB700 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-ULFB700

Serial Number: 260202R1-5

Engineer

Juhyeok Kim DAEIL SYSTEMS

Tuning Date

May 14, 2026

End User

Shanghai Opotong Instruments Co., Ltd.

Number of Tuning Trial

1st

Location

Shanghai, China.

Equipment

Manufacturer: Thermo Fisher Scientific

Equipment: SEM

Model: Axia

Vibration Specification

N/A

(I heard that Thermo Fisher Scientific sets the VC vibration specification standard every time we do it. I don't have YIMO, and I heard that the VC vibration standard specification changes every time in the equipment specification, so I couldn't write down the exact vibration specification.)

Equipment Condition

The equipment is turned on/IDLE

Tuning Request

1st

Measurement Summary

Measurement Point	Status	Axis	VibrationSpecification	Measurement Data
Measurement Point	Status	Axis	VibrationSpecification	Floor	DVIA-ULFB700
1.Floor 2.DVIA-ULFB700	Equipment is Turned on/IDLE	Vertical	N/A	VC-B @ 3.15 Hz	VC-F @ 3.15 Hz
		Left to Right		VC-E @ 3.15 Hz	VC-G @ 3.15 Hz
		Front to Back		VC-D @ 2.5 Hz	VC-G @ 2.5 Hz

Measurement Data Obtained via UI Program

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Reference

The table below classifies vibration levels based on IEST-RP-CC012.2.

Criterion Curve	Description	Amplitude (μm/s) (μin/s)	Detail Size (μm)
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances. Usually adequate for computer equipment, hospital recovery rooms, semiconductor probe test equipment, and microscopes less than 40x.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable in most instances for surgical suites, microscopes to 100x and for other equipment of low sensitivity.	100 (4,000)	25
VC-A	Adequate in most instances for optical microscopes to 400x, microbalances, optical balances, proximity and projection aligners, etc.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment (including steppers) to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate standard for optical microscopes to 1000x, lithography and inspection equipment (including moderately sensitive electron microscopes) to 1μm detail size. TFT-LCD stepper/scanner processes.	12.5 (500)	1-3
VC-D	Suitable in most instances for demanding equipment, including many electron microscopes (SEMs and TEMs) and E-Beam systems.	6.25 (250)	0.1-0.3
VC-E	A challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems, E-Beam lithography systems working at nanometer scales, and other systems requiring extraordinary dynamic stability.	3.12 (125)	< 0.1
VC-F	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	1.56 (62.5)	N/A
VC-G	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	0.78 (31.3)	N/A

Notes:

1. As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).

2. The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is to imaging associated with probe technologies, AFMs, and nanotechnology.

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