Vibration Isolation Case Studies

DVIA-ML3000 (250625R2) installation report — Tier-1 Semiconductor DSR A Tower 5F analysis lab, ZEISS X-ray Microscope Versa 630. Equipment vibration specification as published UI capture; VC / Autospectrum / Transmissibility (merged strip pairs where required); Generic Vibration Criteria as markdown table.

DVIA-ML1000 installation report — ZEISS FE-SEM Sigma 560 (serial 250611R3). Overview states the platform is appropriately installed and functioning as intended. Prepared for, End User, and Location are N/A on the form. Equipment condition: The equipment is installed/IDLE; Tuning Request N/A. UI-program transmissibility (vertical, left-to-right, front-to-back), on-site equipment photo; Reference uses the standard Generic Vibration Criteria markdown table. No vibration specification section and no measurement summary table on the published form.

DVIA-MB3000 (serial 170515R4) on-site tuning and vibration worksheet dated 2025.07.08 at Tier-1 Semiconductor Cheonan campus (equipment Turned on/IDLE): VC curves, autospectra, and transmissibility for floor vs DVIA-MB3000 platform, measurement summary table (vertical floor FAIL / platform PASS at reported frequencies), equipment vibration specification excerpt (VC-C), and Reference as a markdown Generic Vibration Criteria table (no separate reference figure). Engineer Seo Jong-hwa (DAEIL SYSTEMS); report written 2025.07.10.

DVIA-M3000 (240612R3) installation report — Supergravity Laboratory, Hangzhou, China; QIYUE TECHNOLOGY FIB-SEM SS-HV800. Published Transmissibility plots (Vertical, Left to Right, Front to Back), Tuning Request capture, and equipment photograph. Generic vibration criteria presented as markdown table.

DVIA-M3000 (241213R1) installation report at Vertilite (Changzhou, China) for a Raith E-beam lithography system: tuning request capture, vertical/left-to-right/front-to-back transmissibility plots, equipment photo, and generic vibration criteria as a markdown table.

DVIA-ML3000 (240423R5) installation report at the Institute of Geodesy and Geophysics, Beijing — Thermo Fisher TEM Sprectra 300. Report documents axis transmissibility plots and equipment photography; standard reference vibration criteria are provided as a markdown table.