Vibration Isolation Case Studies

DVIA-MB1000 installation report (serial 240517R5) for an optical platform installation at Haitai Semiconductor, WuXi, China.

DVIA-ML1000 installation report (serial 240719R3-2) for Thermo Fisher Helios Nanolab 450 FIB-SEM at NM-TECH, Moscow Zelenograd.

DVIA-ML1000 installation report (serial 260203R3) for ZEISS FE-SEM Sigma 360 at Fuchuang Precision Semiconductor, Beijing, China — 1st tuning May 8, 2026 (report written May 11, 2026). Engineer Juhyeok Kim (DAEIL SYSTEMS). Vibration specification is a UI capture; vertical floor RMS FAIL with platform PASS; horizontal axes PASS. Publishes vibration specification and UI-program VC curves, autospectra, and transmissibility for vertical, left-to-right, and front-to-back axes. Reference uses the standard Generic Vibration Criteria markdown table only.

DVIA-ML1000 installation report — ZEISS Crossbeam 550L FIB-SEM (serial 250806R3). Overview states the platform is appropriately installed and functioning as intended. Vibration-spec UI capture under Vibration specification; Prepared for / End User / Location N/A. Manufacturer line in the report form reads ZEIS. Equipment Condition Turned on/IDLE; Tuning Request N/A. UI-program Autospectrum and Transmissibility per axis. Equipment picture not published (report: Photo Not Allowed).

DVIA-ML1000 installation report — JEOL SEM model JSM-IT500HR (serial 250829R1) at Gedeon Richter Laboratory. Vibration specification is published as the UI capture under Vibration specification; End User N/A on the form. Equipment status and measurement summary (floor vs DVIA-ML1000) per the report; Conclusion notes floor vibration within specification on all axes after installation. VC curves, Autospectrum, and Transmissibility plots per axis from the measurement UI program.

QIYUE TECHNOLOGY SEM660F FIB-SEM at Qingdao Aviation Technology Industry Innovation Base (Qingdao, China), channel — DVIA-ML1000 installation report for the 3rd tuning trial, tuned 2026-04-20 with the equipment turned on/IDLE. The floor reached VC-E at 31.5 Hz vertically and VC-G left to right and front to back, while the DVIA-ML1000 platform held VC-G on all three axes. The engineer also noted that a cooling fan mounted beneath the equipment blows directly onto the platform and affects its performance. Per-axis VC Curves, Autospectrum and Transmissibility plots from the UI program are published together with the on-site equipment photo.