Installation Report

DVIA-M Series

09-13-2021

YIMO STM OEM DVIA-MO1000 (P247) Second Setup Installation Report — September 13, 2021

DVIA-M Series

Installation Report

YIMO

STM

DVIA-MO1000

P247

MO1000 internal program

(MO1000 P247 2ND SETUP)

Target equipment	STM OEM
Place of installation	N/A
Remark	Good Performance
END USER	N/A

Operator: Choi, HyoungMun

Date of setup : 21.09.10

Date of reporting : 21.09.13 | Date of business trip : 17.12.27~17.12.29

Overview

After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.

Measurement date: 21.09.10 (FRI)

Operator: Daeil System, Research engineer Choi, HyoungMun

Place of measurement : N/A

Equipment Model: STM OEM

Measurement conditions and results

Summary of measurement results

Good omnidirectional performance.

Test Condition	Transmissibility
Test Condition	2 Hz	5 Hz
Z	-28 dB	-27 dB
X	-30 dB	-20 dB
Y	-30 dB	-30 dB

MO1000 internal program performance measurement result

Z axis

X axis

Y axis

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

2. Detail size refers to width in microelectronics fabrication or particle size in medical research.

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