Carl Zeiss ZEISS-Xradia 620 Versa DVIA-MB3000 (MB3000_P24) Worksheet — Tier-1 Semiconductor — 2021.12.17
Contents
Target equipment
ZEISS-Xradia 620 Versa
Place of installation
SK이노베이션 3-2건물 지하 1층
Remark
Good Performance
End User
Tier-1 Semiconductor
Operator
Operator: Choi, HyoungMun
Date of setup
21.12.16
Date of reporting
21.12.17
Date of business trip
Date of business trip : 17.12.27~17.12.29
Overview
After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.
Measurement date
Measurement date: 21.12.16 (Thur)
Operator: Daeil System, Research engineer Choi, HyoungMun
Place of measurement
Place of measurement : SK이노베이션 3-2건물 지하 1층
Equipment Model
ZEISS-Xradia 620 Versa
Measurement conditions and results
DAQ System : Data Physics- QUATTRO & Signalcalc Ace
Accelerometer : PCB PIEZOTRONICS 393B05
Frequency Range : 0.7 ~ 200Hz
Measurement conditions (graphics)
Condition graphic 1
Condition graphic 2
Condition graphic 3
Summary of measurement results
| Test Condition | Z | X | Y |
|---|---|---|---|
| Floor | F | G | G |
| Above Active | F | D | F |
Field notes
All axes show satisfactory performance. (During performance checks, each axis was excited to conduct the checks.)
The installed floor is basement-1 concrete and the vibration environment is very good.
Due to equipment vibration, the active top surface appears slightly less favorable than the floor.
Field notes (graphics)
Field note graphic 1
Field note graphic 2
MB3000 internal program performance measurement result
Z axis (internal program)
X axis (internal program)
Y axis (internal program)
Vibration criterion curve
Z axis
X axis
X-axis Top
Y axis
Y-axis Top
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