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Installation Report
DVIA-M Series
07-06-2023

Thermo Fisher Scientific Spectra 200 TEM DVIA-MB3000 Installation Report

DVIA-M Series
Installation Report
Thermo Fisher Scientific

Executive Summary

Introduction

The purpose of this work is to install the Vibration Isolation MB3000 system for the Thermo Fisher Scientific Spectra 200 in Spectra Room.

Summary Results

Below is a summary of the results:

MB3000 ON PASSED the Vibration specifications

Introduction

The purpose of this work is to install the Vibration Isolation MB3000 system for the Thermo Fisher Scientific Spectra 200 in Spectra Room.

Product Details

Part DeliveredSerial NumberSoftware
MB3000220542R2Site-Specific Tune

Summary of Work

We installed the system by

- Leveling the DAEIL SYSTEMS' DVIA-MB3000 platform within 0.5mm.
- Connecting the seismic restrains between the daeil and the tool.

We tested the system by

- Collecting vibration data to verify the performance.

We left the system

- In position and turned off.

Procedures

Vibration

VEC conducted vibration measurements in six directions. Acceleration measurements were taken at a bandwidth of 200 with units of m/s (RMS). The acceleration spectra with 200 bandwidths were recorded.

Setup

ParameterValue
Bandwidth200
Lines3200
WindowHanning
CouplingICP 2mA
Average TypeStable
Duration60
Engineering Unitsum/s (RMS)

Specifications

VEC used the following specifications for the project.

Specification Summary

ToolSpecification
Thermo Fisher Scientific Spectra 200Vibration: VC-F, All Directions: VC-G

Detailed Specifications

Results

Summary Results
Below is a summary of the results:
- MB3000 PASSED the Vibration specifications

Detailed Results

TypePositionDirectionSpecificationMeasurementResult
VibrationFloorZ-AxisVC-GVC-EFAIL
X-AxisVC-GPASS
Y-AxisVC-FFAIL
MB3000Z-AxisVC-GPASS
X-AxisVC-GPASS
Y-AxisVC-GPASS

Data

Spectra Room - Thermo Fisher Scientific Spectra 200

Vibration

Figure 1: Z-Axis – Floor

Figure 2: Z-Axis – MB 3000

Figure 3: Z-Axis – Transmissibility

Figure 4: X-Axis – Floor

Figure 5: X-Axis – MB 3000

Figure 6: X-Axis – Transmissibility

Figure 7: Y-Axis – Floor

Figure 8: Y-Axis – MB 3000

Figure 9: Y-Axis – Transmissibility

Figure 10: Equipment Picture

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date07-06-2023
Tags
DVIA-M Series
Installation Report
Thermo Fisher Scientific