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Installation Report
DVIA-M Series
02-11-2026

Covis Technology AID Robotics DVIA-ML1000S & DVIP-B Installation Report

DVIA-M Series
Installation Report
Covis
AID Robotics
DVIP-B
DVIA-ML1000S
DVIA-ML1000

Overview

Tuning and vibration measurement were performed for DVIA-ML1000S and DVIP-B installed at the AID Robotics 1F lab.

Work was carried out with the tool turned off (report).

Data are presented as VC curves with Reference vibration criteria .

Vibration Isolation System Info

Model: DVIA-ML1000S, DVIP-B

Serial number: 260108R1

Engineer

Chaewon Lee — DAEIL SYSTEMS (field service)

Installation date

February 11, 2026

Report written date

February 12, 2026

Installation site

AID Robotics, 1F research lab

End user

Covis Technology

Customer equipment

Manufacturer: Covis Technology — in-house / custom

Vibration specification (for DVIA-ML1000S summary)

VC-D

Equipment status

Installed / Turned off

Measurement device

Data Physics DAQ: QUATTRO, SN 22436, SignalCalc ACE

Accelerometer: PCB 393B05

Measurement setup

F span: 200 Hz — Lines: 3200 — Engineering units: m/s (per report) — Window: Hanning — FFT spectrum averaging — Exponential, 40

Conclusion

DVIP-B: Floor input is very low, so transmissibility may look less pronounced; isolation is still operating correctly. Some high-frequency content is attributed to the DVIA-ML1000S controller cooling fan. Resonance around 10–30 Hz is within normal passive-isolation behavior.

DVIA-ML1000S: Stable isolation even in a very quiet floor environment; VC-G-class levels were measured on the platform in all directions.

Measurement summary — 1) DVIP-B

(turned off)

LocationPointStateAxisFloorOn DVIP-B
AID Robotics 1F1. Floor /
2. DVIP-B
Turned offVerticalVC-G @ 63 HzVC-G @ 63 Hz
L–RVC-E @ 100 HzVC-F @ 100 Hz
F–BVC-G @ 100 HzVC-G @ 100 Hz

Measurement summary — 2) DVIA-ML1000S

(turned off, vertical spec VC-D)

LocationPointStateAxisSpecMeasured (floor)Measured (ML1000S)Result
AID Robotics 1F1. Floor /
2. ML1000S
Turned offVerticalVC-DVC-F @ 25 Hz / VC-G @ 25 HzPASS / PASS
L–RVC-F @ 10 Hz / VC-G @ 10 HzPASS / PASS
F–BVC-G @ 50 Hz / VC-G @ 50 HzPASS / PASS

Data and Image

14-1 DVIP-B: Vertical / L–R / F–B — VC Curves, Autospectrum, Transmissibility

14-2 DVIA-ML1000S: Vertical / L–R / F–B — same layout

DVIP-B — Vertical VC Curves

DVIP-B — Vertical Narrow Band

DVIP-B — Vertical Transmissibility

DVIP-B — Left to Right VC Curves

DVIP-B — Left to Right Narrow Band

DVIP-B — Left to Right Transmissibility

DVIP-B — Front to Back VC Curves

DVIP-B — Front to Back Narrow Band

DVIP-B — Front to Back Transmissibility

DVIA-ML1000S — Vertical VC Curves

DVIA-ML1000S — Vertical Narrow Band

DVIA-ML1000S — Vertical Transmissibility

DVIA-ML1000S — Left to Right VC Curves

DVIA-ML1000S — Left to Right Narrow Band

DVIA-ML1000S — Left to Right Transmissibility

DVIA-ML1000S — Front to Back VC Curves

DVIA-ML1000S — Front to Back Narrow Band

DVIA-ML1000S — Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date02-11-2026
Tags
DVIA-M Series
Installation Report
Covis
AID Robotics
DVIP-B
DVIA-ML1000S
DVIA-ML1000