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Installation Report
DVIA-M Series
07-05-2024

FEI NOVA NanoSEM 450 FE-SEM DVIA-M1000 (240315R5) Installation Report

DVIA-M Series
Installation Report
FEI
NOVA NanoSEM 450
FE-SEM
DVIA-M1000
240315R5

Contents

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-M1000

Serial Number: 240315R5

Engineer

Chaewon Lee from DAEIL SYSTEMS

Tuning Date

May 22, 2024

Report written date

July 05, 2024

End User

N/A

Number of Tuning Trial

1st

Location

N/A

Equipment

Manufacturer: FEI

Equipment: FE-SEM

Model: NOVA NanoSEM 450

Equipment Condition

The equipment is installed

Data and Image

Vertical Transmissibility

Left to Right Transmissibility

Front to Back Transmissibility

Equipment picture

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
µm/s (µin/s)		Detail Size
µm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAdequate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date07-05-2024
Tags
DVIA-M Series
Installation Report
FEI
NOVA NanoSEM 450
FE-SEM
DVIA-M1000
240315R5

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