Installation Report

DVIA-M Series

07-05-2024

FEI FE-SEM NOVA NANOSEM 450 DVIA-M1000 (160808R2-2) Installation Report — 2024-07-05

DVIA-M Series

Installation Report

FEI

NOVA NanoSEM 450

DVIA-M1000

160808R2-2

(MB1000_160808R2-2 Set-up)

Target equipment

FEI FE-SEM NOVA NANOSEM 450

Place of installation

Remark

Good Performance

END USER

Operator

Operator: Byeonghun Cho

Date of setup

24.03.25

Date of reporting

24.07.05

Date of business trip

Date of business trip : 17.12.27~17.12.29

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Measurement date

Measurement date: 2024.03.25 (Monday)

Operator: Byeonghun Cho from DAEIL SYSTEMS

Place of measurement

Equipment Model

FEI FE-SEM NOVA NANOSEM 450

M1000 internal program performance measurement result

Vertical

Left to Right

Front to Back

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

2. Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

DVIA-M1000 P9 vibration environment measurement — Incheon Production Technology Institute — 2015-01-05

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