DVIA-M1000 P9 vibration environment measurement — Incheon Production Technology Institute — 2015-01-05
Contents
Vibration environment measurement results (Incheon Production Technology Institute)
Overview
To assess whether the vibration environment meets the user's requirements after applying the M-1000 P9 vibration isolation platform.
Measurement date and time: 2015. 1. 5 (Mon) 15:30, Measurer: 최성원
Measurement site: Incheon Production Technology Institute, 1st floor
4. Measurement conditions and results
FEI Nova Nano SEM 450 is installed; the installed tool’s internal passive isolation and instrument functions are operating.
Equipment position changes and partition installation are planned, so the environment may change.
Measurements were taken at the center of the isolation platform and on the front floor of the isolation platform (base), with no added mass.
Measurement site photo
Results summary
| Test Direction | Axis | VC-Class (Base) | VC-Class (Top) |
|---|---|---|---|
| ACTIVE | Z | D | G |
| X | F | G | |
| Y | F | G |
Isolation platform intrinsic performance is satisfactory.
Floor vibration environment is favorable: horizontal axes F Class and vertical axis D Class. Despite the institute staff’s concern that vibration could be problematic with an empty floor and a basement below, the measured levels were favorable.
With active control, the vibration environment on the isolation platform top surface is satisfactory at G Class or better.
VAAV program measurement results
FFF Z
FFF X
FFF Y
Octave band
Active Z
Active X
Active Y
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