Banwol Hi-Tech 4F — Daeil Analysis Research Institute — DVIA-M1000 (M1000 P10) vibration survey — 2015-02-12

Vibration environment measurement results (Banwol Hi-Tech 4F, Daeil Analysis Research Institute)

To determine whether the vibration environment satisfies equipment use requirements after installation of the M-1000 P10 vibration isolation platform.

Measurement date: Wednesday, 12 February 2015. Measurers: Seongwon Choi, Jongwook Lim.

TESCAN equipment is mounted on the platform. The equipment’s internal active isolator is floated only; the entire tool set remains off.

Sensors are placed on the front of the platform top (top) and on the floor in front of the platform (base), with no deliberate excitation applied during the measurement.

State: ACTIVE

The isolator intrinsic performance is favorable.

With active control, the platform-top vibration environment is favorable at G class.

The issuance handout includes a 1/3 octave band chart for the active Z condition (velocity, top and base traces with VC reference overlays) as a vector chart only; no separate bitmap is published on this page.

The issuance handout includes a 1/3 octave band chart for the active X condition (velocity, top and base traces with VC reference overlays) as a vector chart only; no separate bitmap is published on this page.

The issuance handout includes a 1/3 octave band chart for the active Y condition (velocity, top and base traces with VC reference overlays) as a vector chart only; no separate bitmap is published on this page.