Daeil Analysis Laboratory — M-1000 P10 vibration environment measurement (TESCAN, 2015-02-12)
Contents
Vibration measurement report
(Banwol Hi-Tech 4F, Daeil Analysis Laboratory)
Overview
To assess whether the vibration environment after installation of the M-1000 P10 vibration isolation table meets equipment use requirements.
Measurement date: 2015-02-12 (Wednesday). Operators: Choi Seong-won, Lim Jong-wook.
Measurement conditions and results
TESCAN equipment is installed. The built-in active isolation table is floated only; the entire system is not in operation.
Sensor locations: front of the isolation table top plate (top) and front floor at the table base (base). Measurements were taken without excitation.
Measurement setup
Measurement summary
| Test Direction | VC-Class | Base | Top |
|---|---|---|---|
| ACTIVE | Z | C | G |
| X | E | G | |
| Y | E | G |
The isolation table intrinsic performance is satisfactory.
With active control, the vibration environment on the isolation table top is G class and satisfactory.
VAAV program measurement results
VAAV program (Z)
VAAV program (X)
VAAV program (Y)
Octave band results
Active Z
Active X
Active Y
Remarks
The installed equipment has a built-in active isolation table, estimated to be a Halcyonics product.
Laboratory view
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