Korea Institute of Industrial Technology — M-1000 P9 relocation vibration survey (FEI Nova Nano SEM 450, 2015-07-16)
Contents
Vibration environment measurement results (Korea Institute of Industrial Technology relocation installation)
Overview
After relocation installation of the M-1000 P9 vibration isolation platform, the vibration environment and performance were verified.
Measurement date and time: 2015-07-16 (Thursday) 15:30. Measured by: Lim Jong-wook.
Measurement site: Jeongwang-dong, Oido, Siheung-si, Gyeonggi-do, Korea Institute of Industrial Technology (relocation installation site).
4. Measurement conditions and results
FEI Nova Nano SEM 450 installed; the installed equipment’s internal passive isolation and instrument functions were operating.
Equipment setup was not completed.
Measurement locations: center of the isolation platform top and the floor in front of the platform (base).
The vertical axis was measured with excitation; the horizontal axes were measured without excitation.
Measurement layout
Results summary
| Test Direction | VC-Class | Base | Top |
|---|---|---|---|
| ACTIVE | Z | A | E |
| X | F | F | |
| Y | F | F |
Isolation platform intrinsic performance is satisfactory.
Equipment setup was still in progress, the measurement site floor was very stiff, and the horizontal axes showed no change in Class.
The vertical axis was manually excited and performance and the vibration environment were measured.
Floor vibration was Class F on the horizontal axes, and Class A on the vertical axis when excited.
With active control on, vibration on the isolation platform top was Class E on the vertical axis and Class F or better on the horizontal axes.
VAAV program measurement results
FFF Z
FFF X
FFF Y
OCTAVE BAND
Active Z
Active X
Active Y
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