YIMO ZEISS FE-SEM Sigma360 DVIA-MB1000 (240119R5) Installation Report — Wuxi Aotewei Technology

DVIA-M Series

Installation Report

YIMO

DVIA-MB1000

240119R5

ZEISS

Sigma360

FE-SEM

Wuxi

Prepared for

Wuxi Aotewei Technology Co., Ltd.

Engineer: Chaewon Lee

Tuning date: 24.04.09

Report written date: 24.07.06

The DVIA-MB1000 active vibration isolation platform is appropriately installed and functioning as intended.

Model: DVIA-MB1000

Serial Number: 240119R5

Chaewon Lee from DAEIL SYSTEMS

April 09, 2024

1st

Wuxi

Manufacturer: ZEISS

Equipment: FE-SEM

Model: Sigma360

The equipment is installed

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A