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Installation Report
DVIA-M Series
01-23-2026

YIMO Omicron STM DVIA-M1000 (2309050R3) Installation Report — Beijing Academy of Quantum Information Sciences

DVIA-M Series
Installation Report
YIMO
Omicron
STM
Beijing
DVIA-M1000
2309050R3

Contents

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-M1000

Serial Number: 2309050R3

Engineer

Chaewon Lee DAEIL SYSTEMS

Tuning Date

January 23, 2026

Report written date

26.01.23

End User

Beijing Academy of Quantum Information Sciences

Number of Tuning Trial

4th

Location

Beijing, China

Equipment

Manufacturer: Omicron

Equipment: STM

Model: -

Vibration Specification

N/A

Equipment Condition

The equipment is turned on/IDLE

Tuning Request

N/A

Measurement Data Obtained via UI Program

Vertical Autospectrum

Vertical Transmissibility

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

2. Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date01-23-2026
Tags
DVIA-M Series
Installation Report
YIMO
Omicron
STM
Beijing
DVIA-M1000
2309050R3

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