Omicron STM DVIA-M1000 (2309050R3) Installation Report — Beijing Academy of Quantum Information Sciences

DVIA-M Series

Installation Report

Omicron

STM

Beijing

DVIA-M1000

2309050R3

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Model: DVIA-M1000

Serial Number: 2309050R3

Chaewon Lee DAEIL SYSTEMS

January 23, 2026

26.01.23

Beijing Academy of Quantum Information Sciences

4th

Beijing, China

Manufacturer: Omicron

Equipment: STM

Model: -

N/A

The equipment is turned on/IDLE

N/A

Generic Vibration Criteria

Criterion Curve	Description	Amplitude µm/s (µin/s)	Detail Size µm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A