Installation Report
DVIA-M Series
05-15-2026
LG Gemini 560 DVIA-M1000 (230804R2) Installation Report
DVIA-M Series
Installation Report
LG
Gemini 560
DVIA-M1000
230804R2
Contents
Overview
The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.
Measurement date: 2023.09.04 (Monday)
Operator: DAEIL SYSTEMS Jongwon Park
Place of measurement: Nanjing
Equipment Model: Gemini 560
5.
M1000 internal program performance measurement result
Z axis
X axis
Y axis
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date05-15-2026
Tags
DVIA-M Series
Installation Report
LG
Gemini 560
DVIA-M1000
230804R2
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