Zhongju Core Quzhou Technology Hitachi High-Tech SU-8600 SEM DVIA-M1000 Installation Report

DVIA-M Series

Installation Report

Zhongju Core Quzhou Technology

Hitachi High-Tech

SU-8600

DVIA-M1000

250320R4

Quzhou City

Overview

Following the installation of DVIA-M1000 at Quzhou City, tuning and vibration measurement were performed.

Vibration measurement was conducted with the equipment in the IDLE state.

Data is represented in VC Curve format and reference material on the vibration level is provided.

Vibration Isolation System Information

Model: DVIA-M1000

Serial Number: 250320R4

Engineer

Taehun KIM, DAEIL SYSTEMS

Tuning Date

May 18, 2026

End User

Zhongju Core Quzhou Technology Co., Ltd.

Number of Tuning Trial

1st

Location

Quzhou City

Equipment

Manufacturer: Hitachi High-Tech

Equipment: SEM

Model: SU-8600

Vibration Specification

Horizontal

Frequency [Hz]	Limit [µm pk-pk]
1	8
1.5	3
2	1.4
2.4	1.4
3	3
5	4
6	3.5
10	3.5

Vertical

Frequency [Hz]	Limit [µm pk-pk]
1	20
2	10
3	5
4	2.7
5	1.8
6	1
7	1
10	1

Equipment Condition

The equipment is turned on/IDLE

Tuning Request

N/A

Measurement Summary

Measurement Point	Vibration Specification	Axis	Floor	DVIA-M1000
1. Floor 2. DVIA-M1000	See Section 9	Vertical	✓ PASS	✓ PASS
		Left to Right	✓ PASS	✓ PASS
		Front to Back	✓ PASS	✓ PASS

Data and Image

Vertical Autospectrum

Left to Right Autospectrum

Front to Back Autospectrum

Installation Photo

Reference

The table below classifies vibration levels based on IEST-RP-CC012.2.

Criterion Curve	Description	Amplitude (μm/s) (μin/s)	Detail Size (μm)
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances. Usually adequate for computer equipment, hospital recovery rooms, semiconductor probe test equipment, and microscopes less than 40x.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable in most instances for surgical suites, microscopes to 100x and for other equipment of low sensitivity.	100 (4,000)	25
VC-A	Adequate in most instances for optical microscopes to 400x, microbalances, optical balances, proximity and projection aligners, etc.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment (including steppers) to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate standard for optical microscopes to 1000x, lithography and inspection equipment (including moderately sensitive electron microscopes) to 1μm detail size. TFT-LCD stepper/scanner processes.	12.5 (500)	1-3
VC-D	Suitable in most instances for demanding equipment, including many electron microscopes (SEMs and TEMs) and E-Beam systems.	6.25 (250)	0.1-0.3
VC-E	A challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems, E-Beam lithography systems working at nanometer scales, and other systems requiring extraordinary dynamic stability.	3.12 (125)	< 0.1
VC-F	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	1.56 (62.5)	N/A
VC-G	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	0.78 (31.3)	N/A

Notes:

1. As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).

2. The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc.