Changdi New Materials Technology Hitachi High-Tech SU3800SE FE-SEM DVIA-ML1000 Installation Report
Contents
Overview
Following the installation of DVIA-ML1000 at Shanghai, tuning and vibration measurement were performed.
Vibration measurement was conducted with the equipment in the IDLE state.
Data is represented in VC Curve format and reference material on the vibration level is provided.
Vibration Isolation System Information
Model: DVIA-ML1000
Serial Number: 260110R2
Engineer
Taehun Kim, DAEIL SYSTEMS
Tuning Date
June 29, 2026
End User
Changdi New Materials Technology
Number of Tuning Trial
1st
Location
Shanghai
Equipment
Manufacturer: Hitachi High-Tech
Equipment: FE-SEM
Model: SU3800SE
Vibration Specification
Horizontal
| Frequency [Hz] | Limit [µm pk-pk] |
|---|---|
| 2 | 1.5 |
| 3 | 1.6 |
| 5 | 3 |
| 8 | 2 |
| 10 | 1.3 |
Vertical
| Frequency [Hz] | Limit [µm pk-pk] |
|---|---|
| 2 | 10 |
| 3 | 5 |
| 5 | 2 |
| 8 | 1.5 |
| 10 | 3 |
Equipment Condition
IDLE
Tuning Request
N/A
Measurement Summary
| Measurement Point | Vibration Specification | Axis | Floor | DVIA-ML1000 |
|---|---|---|---|---|
| 1. Floor 2. DVIA-ML1000 | Refer to Vibration Specification | Vertical | ✗ FAIL | ✓ PASS |
| Left to Right | ✓ PASS | ✓ PASS | ||
| Front to Back | ✓ PASS | ✓ PASS |
Data and Image
Vertical Autospectrum
Left to Right Autospectrum
Front to Back Autospectrum
Installation Photo
Reference
The table below classifies vibration levels based on IEST-RP-CC012.2.
Notes:
1. As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).
2. The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc.
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