Installation Report
DVIA-M Series
10-04-2023
ZEISS sigma300 SEM DVIA-M1000 Internal Program Performance Report — Trina Solar (Changzhou, 2023)
DVIA-M Series
Installation Report
DVIA-M1000
ZEISS
sigma300
SEM
Trina Solar
Changzhou
Contents
(M1000_ 230602R3 Set up)
Equipment installation
| Target equipment | sigma300 |
|---|---|
| Place of installation | Changzhou |
| Remark | Good Performance |
| END USER | Trina Solar |
Operator: Lee, Youngha
Date of setup: 23.09.27
Date of reporting: 23.10.04
Date of business trip : 17.12.27~17.12.29
Overview
The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.
Measurement date: 2023.09.27 (Wednesday)
Operator: DAEIL SYSTEMS Youngha Lee
Place of measurement: Changzhou
Equipment Model: sigma300
M1000 internal program performance measurement result
Z axis
X axis
Y axis
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date10-04-2023
Tags
DVIA-M Series
Installation Report
DVIA-M1000
ZEISS
sigma300
SEM
Trina Solar
Changzhou
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