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Installation Report
DVIA-M Series
07-05-2024

JEOL JSM-IT800 FE-SEM DVIA-MB1000 (230512R3) Installation Report

DVIA-M Series
Installation Report
JEOL
JSM-IT800
FE-SEM
DVIA-MB1000
230512R3

Contents

Customer

Tier-1 Semiconductor

Written by

N/A

Engineer

Chaewon Lee from DAEIL SYSTEMS

Tuning Date

May 28, 2024

Report written date

July 5, 2024

Vibration Isolation System Information

Model: DVIA-MB1000

Serial Number: 230512R3

Installation Site

Ningbo SMIC, China

Equipment

Manufacturer: JEOL

Equipment: FE-SEM

Model: JSM-IT800

Equipment Status

The equipment was installed on the DVIA-MB1000 platform and turned on/IDLE

End User

Tier-1 Semiconductor

Number of Tuning Trial

2nd (1st :2023.08.23)

Vibration Spec

N/A

Conclusion

The DVIA-MB1000 active vibration isolation platform is appropriately installed and functioning as intended.

Data & Image

Vertical Transmissibility

Left to Right Transmissibility

Front to Back Transmissibility

Equipment photo

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date07-05-2024
Tags
DVIA-M Series
Installation Report
JEOL
JSM-IT800
FE-SEM
DVIA-MB1000
230512R3

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