TESCAN Solaris GMH FIB-SEM DVIA-M1000 (230116R2) Installation Report

DVIA-M Series

Installation Report

TESCAN

Solaris GMH

FIB-SEM

DVIA-M1000

230116R2

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Model: DVIA-M1000

Serial Number: 230116R2

Operator: Park, Jong Won

Date of setup: 23.07.04

Date of reporting: 23.07.07

Date of business trip: 17.12.27~17.12.29

END USER: HUWEI

Place of installation: HUWEI

Measurement date: 2023.07.06 (Thursday)

Operator: DAEIL SYSTEMS, Jongwon Park

Place of measurement: HUWEI

Equipment Model: HUWEI

Target equipment: Solaris GMH FIB-SEM

Remark: Good Performance

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A