Skip to main content
Installation Report
DVIA-M Series
02-01-2024

TESCAN Solaris GMH FIB-SEM DVIA-M1000 (230509R6-3) — Pengxin Micro, 2024-01-31

DVIA-M Series
Installation Report
TESCAN
Solaris
GMH
FIB-SEM
DVIA-M1000
DVIA-ML1000
230509R6-3
Shenzhen

Contents

鹏芯微 (Pengxin Micro)

(M1000_ 230509R6-3 Set up)

Target equipmentTESCAN Solaris GMH FIB-SEM
Place of installation深圳
RemarkGood Performance
END USER鹏芯微
Operator: Lee, Youngha Date of setup: 24.01.31 Date of reporting: 24.02.01Date of business trip : 17.12.27~17.12.29
Overview The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended. Measurement date: 2024.01.31 (Wednesday) Operator: DAEIL SYSTEMS Youngha Lee Place of measurement: 深圳 Equipment Model: TESCAN Solaris GMH FIB-SEM5.

M1000 internal program performance measurement result

Z axis

X axis

Y axis

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

Share this Case Study

Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date02-01-2024
Tags
DVIA-M Series
Installation Report
TESCAN
Solaris
GMH
FIB-SEM
DVIA-M1000
DVIA-ML1000
230509R6-3
Shenzhen

Related Case Studies

Peking University Shenzhen Graduate School Thermo Fisher Helios 5 CX FIB-SEM DVIA-M1000 (250613R3) Installation Report
DVIA-M Series

Peking University Shenzhen Graduate School Thermo Fisher Helios 5 CX FIB-SEM DVIA-M1000 (250613R3) Installation Report

11-11-2025Read more
TESCAN SOLARIS GMH DVIA-M1000 (230501R3-1) Installation Report
DVIA-M Series

TESCAN SOLARIS GMH DVIA-M1000 (230501R3-1) Installation Report

05-15-2026Read more
YIMO BYD Semiconductor ZEISS Crossbeam 550 FIB-SEM DVIA-M1000 (240314R6) Installation Report
DVIA-M Series

YIMO BYD Semiconductor ZEISS Crossbeam 550 FIB-SEM DVIA-M1000 (240314R6) Installation Report

05-11-2026Read more