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Installation Report
DVIA-M Series
07-05-2024

DVIA-M1000 (230111R6) Set-up Report — ZEISS Sigma500

DVIA-M Series
Installation Report
DVIA-M1000
230111R6
ZEISS
Sigma500

Target equipment

ZEISS Sigma500

Place of installation

N/A

Remark

Good Performance

END USER

N/A

Date of setup

24.03.22

Date of reporting

24.07.05

Date of business trip

17.12.27~17.12.29

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Measurement date

2024.03.22(Wednesday)

Operator

Chaewon Lee from DAEIL SYSTEMS

Place of measurement

N/A

Equipment Model

Manufacturer: ZEISS

Equipment: SEM

Model: Sigma500

M1000 internal program performance measurement result

Vertical

Left to Right

Front to Back

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date07-05-2024
Tags
DVIA-M Series
Installation Report
DVIA-M1000
230111R6
ZEISS
Sigma500