Installation Report
DVIA-M Series
05-15-2026
PXW ZEISS GeminiSEM560 DVIA-M1000 (230525R8) Installation Report
DVIA-M Series
Installation Report
PXW
ZEISS
GeminiSEM560
DVIA-M1000
230525R8
Shenzhen
Contents
Installation Summary
| Field | Value |
|---|---|
| Target equipment | GeminiSEM560 |
| Place of installation | Shenzhen |
| Remark | Good Performance |
| END USER | PXW |
Schedules
| Scheduling | Business trip |
|---|---|
| Operator: Park, Jongwon Date of setup: 23.09.07 Date of reporting: 23.09.22 | Date of business trip : 17.12.27~17.12.29 |
Installation setup tag
(M1000_ 230525R8 Set up)
Overview
The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.
Measurement details
Measurement date: 2023.09.07 (Thursday)
Operator: DAEIL SYSTEMS Jongwon Park
Place of measurement: Shenzhen
Equipment Model: GeminiSEM560
M1000 internal program performance measurement result
5.
Z axis
X axis
Y axis
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date05-15-2026
Tags
DVIA-M Series
Installation Report
PXW
ZEISS
GeminiSEM560
DVIA-M1000
230525R8
Shenzhen
