Installation Report

DVIA-M Series

07-07-2023

Sigma500 DVIA-M1000 Installation Report (Hubei Xingyou, 221118R1)

DVIA-M Series

Installation Report

DVIA-M1000

Sigma500

Hubei Xingyou

China

(M1000_ 221118R1 Set up)

Equipment

Target equipment: Sigma500

Place of installation: HUBEI

Remark

Good Performance

End user

Hubei Xingyou New Energy Technology Co., Ltd.

Operator

Park, Jong Won

Report dates

Date of setup: 23.07.04

Date of reporting: 23.07.07

Date of business trip : 17.12.27~17.12.29

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Info

Model: DVIA-M1000

Serial number: 221118R1

Measurement

Measurement date: 2023.07.04 (Tuesday)

Operator: DAEIL SYSTEMS, Jongwon Park

Place of measurement: HUBEI

Equipment Model: Sigma500

M1000 internal program performance measurement result

Z axis

X axis

Y axis

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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