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Installation Report
DVIA-M Series
06-27-2022

Youngwoo DSP Cheonan Testbed DVIA-MO1000 (211012R12-1) Korean MO1000 Handout Installation Report — June 27, 2022

DVIA-M Series
Installation Report
Youngwoo DSP
Cheonan
DVIA-MO1000
211012R12-1
MO1000

Contents

Prepared for

영우 DSP

Engineer: Youngha Lee

Tuning date: 22.06.23

Report written date: 22.06.27

Date of business trip : 17.12.27~17.12.29

Overview

소재부품 기술개발과제 1차년도 제진대 제품으로 영우 DSP 1층 Testbed Cleanroom에 설치된, 제진대 2대 중 1대 이전 설치 후 SETUP 및 진동측정 진행

System Information

Model: DVIA-MO1000

Serial Number: 211012R12-1

Engineer

DAEIL SYSTEMS 개발팀 이영하(youngha.lee@daeilsys.com)

Tuning Date

2022년 06월 23일 14시

Location

충청남도 천안시 서북구 영우DSP 본사 1층 Cleanroom

Equipment

개발 장비

진동 측정 장비

DAQ System: B&K PULSE 22 & LAN-XI Type 3050

Accelerometer: PCB PIEZOTRONICS 393B05

Summary of Vibration Results

Measurement PointZ-axis (Vertical) 1-10 HzZ-axis (Vertical) 10-80 HzX-axis (Left to Right) 1-10 HzX-axis (Left to Right) 10-80 HzY-axis (Front to Back) 1-10 HzY-axis (Front to Back) 10-80 Hz
FloorGFGGGG
ActiveGFGGGF

Data and Image

Z-axis (Vertical) VC curves

Z-axis (Vertical) Transmissibility

X-axis (Left to Right) VC curves

X-axis (Left to Right) Transmissibility

Y-axis (Front to Back) VC curves

Y-axis (Front to Back) Transmissibility

Reference

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

2. Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date06-27-2022
Tags
DVIA-M Series
Installation Report
Youngwoo DSP
Cheonan
DVIA-MO1000
211012R12-1
MO1000

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