Installation Report

DVIA-M Series

11-21-2022

Youngwoo DSP Cheonan DVIA-MO1000 (211012R12-2) Installation Report — November 21, 2022

DVIA-M Series

Installation Report

Youngwoo DSP

Cheonan

DVIA-MO1000

211012R12-2

Prepared for

Youngwoo DSP Co., Ltd. (㈜영우디에스피)

Engineer: Youngha Lee

Tuning date: 22.11.21

Report written date: 22.11.21

Date of business trip : 17.12.27~17.12.29

Overview

For the second-year materials/components technology-development project, pneumatic active (Active) vibration isolation platform characterization was conducted for the product installed at YoungwooDSP Cheonan headquarters 1st floor Testbed Cleanroom—including UI Program tuning and vibration measurement.

System information

Model: DVIA-MO1000-2412M-300t-100H

Serial Number: 211012R12-2

Engineer

DAEIL SYSTEMS 개발팀 이영하(youngha.lee@daeilsys.com)

Tuning Date

2022년 11월 21일

Location

충청남도 천안, 영우DSP 본사 1층 Cleanroom

Equipment

소재부품기술개발 제진대 개발 장비

Measuring equipment

7.1) PULSE 22

Hardware: Bruel & Kjaer Type 3050-A-040

Software: LapShop Application(PULSE Lapshop)

LAN-XI input module

Pulse LabShop application

7.2) Acceleration Sensor

PCB Accelerometer

Model: 393B05

PCB Piezotronics accelerometer illustration

Summary of vibration results

8.1) VC-Curve

N/A

8.2) Transmissibility

Data and image

9.1) Z-axis (Vertical) VC curves

9.2) Z-axis (Vertical) Transmissibility

-10Hz에서 -30.85dB의 진동 전달률

9.3) X-axis (Left to Right) VC curves

9.4) X-axis (Left to Right) Transmissibility

-10Hz에서 -33.46dB의 진동 전달률

9.5) Y-axis (Front to Back) VC curves

9.6) Y-axis (Front to Back) Transmissibility

-10Hz에서 -33.83dB의 진동 전달률

9.7) Equipment photo

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A