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Installation Report
DVIA-M Series
06-24-2022

Jinnan Steel Group ZEISS EVO15 DVIA-M1000 (220329R1) Installation Report, Linfen

DVIA-M Series
Installation Report
Jinnan Steel Group
ZEISS
EVO15
DVIA-M1000
220329R1
Linfen

Contents

M1000 setup (220329R1)

Equipment and installation site

Target equipment

ZEISS EVO15

Place of installation

LINFEN

Remark

Good Performance

END USER

晋南钢铁集团（JINNAN STEEL GROUP）

Operator and dates

Operator: Lee, Young Ha

Date of setup: 22.06.24

Date of reporting: 22.06.24

Date of business trip : 17.12.27~17.12.29

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Measurement details

Measurement date: 2022.06.24 (Friday),

Operator: DAEIL SYSTEMS, Youngha Lee

Place of measurement: LINFEN, China

Equipment Model: ZEISS EVO15

MB1000 internal program performance measurement result

Z axis

X axis

Y axis

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date06-24-2022
Tags
DVIA-M Series
Installation Report
Jinnan Steel Group
ZEISS
EVO15
DVIA-M1000
220329R1
Linfen

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