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Installation Report
DVIA-M Series
08-25-2022

ZEISS EVO15 DVIA-M1000 Internal Program Performance Report — Carl Zeiss (Guangzhou, 2022)

DVIA-M Series
Installation Report
DVIA-M1000
ZEISS
EVO15
Carl Zeiss
Guangzhou

(M1000_ 220324R5 Set up)

Target equipmentZEISS EVO15
Place of installationGuangzhou
RemarkGood Performance
END USERCarl Zeiss Optics (Guangzhou) Co., Ltd.

Operator: Lee, Young Ha

Date of setup: 22.08.16

Date of reporting: 22.08.25

Date of business trip : 17.12.27~17.12.29

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Measurement date: 2022.08.16 (Tuesday),

Operator: DAEIL SYSTEMS, Youngha Lee

Place of measurement: Guangzhou

Equipment Model: ZEISS EVO15

MB1000 internal program performance measurement result

Z axis

X axis

Y axis

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date08-25-2022
Tags
DVIA-M Series
Installation Report
DVIA-M1000
ZEISS
EVO15
Carl Zeiss
Guangzhou