ZEISS FE-SEM Sigma 360 DVIA-M1000 (250122R2) Installation Report

DVIA-M Series

Installation Report

DVIA-M1000

250122R2

ZEISS

Sigma 360

FE-SEM

Guangzhou

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Model: DVIA-M1000

Serial Number: 250122R2

Chaewon Lee from DAEIL SYSTEMS

June 12, 2025

25.06.12

1st

Guangzhou

Lens Technology

Manufacturer: ZEISS

Equipment: FE-SEM

Model: Sigma 360

The equipment is installed/Turned off

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude µm/s (µin/s)	Detail Size µm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A