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Installation Report
DVIA-M Series
04-22-2022

Carl Zeiss Magok LG Science Park ZEISS Versa 620 (X-ray) DVIA-MB3000 (220310R3) Installation Report — 2022.04.22

DVIA-M Series
Installation Report
Carl Zeiss
LG Science Park
Versa 620
X-ray
DVIA-MB3000
220310R3

Contents

Prepared for

Carl Zeiss (Magok LG Science Park)

Prepared by

Sales: SeoungHoon Cheon

Tuning date: 22.04.22

Report written date: 22.04.25

Date of business trip : 17.12.27~17.12.29

Overview

The DVIA-MB3000 active vibration isolation platform is appropriately installed and functioning as intended.

System Information

Model: DVIA-MB3000

Serial Number: 220310R3

Engineer

Youngha Lee, Seounghoon Cheon from DAEIL SYSTEMS

Tuning Date

April 22, 2022

Location

LG Science Park, Magok seoul

Equipment

Zeiss Versa 620(X-ray)

Summary of Vibration Results

Measurement PointZ-axis (Vertical) 1-10 HzZ-axis (Vertical) 10-80 HzX-axis (Left to Right) 1-10 HzX-axis (Left to Right) 10-80 HzY-axis (Front to Back) 1-10 HzY-axis (Front to Back) 10-80 Hz
FloorEDGGGF
ActiveGFFEGF

Data and Image

Z-axis (Vertical) VC curves — Floor

Z-axis (Vertical) VC curves — Active

Z-axis (Vertical) Transmissibility

X-axis (Left to Right) VC curves — Floor

X-axis (Left to Right) VC curves — Active

X-axis (Left to Right) Transmissibility

Y-axis (Front to Back) VC curves — Floor

Y-axis (Front to Back) VC curves — Active

Y-axis (Front to Back) Transmissibility

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date04-22-2022
Tags
DVIA-M Series
Installation Report
Carl Zeiss
LG Science Park
Versa 620
X-ray
DVIA-MB3000
220310R3

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