Hitachi SU8010 (Sun Yat-sen University) DVIA-M1000 Installation Report

DVIA-M Series

Installation Report

Hitachi

SU8010

SEM

DVIA-M1000

Sun Yat-sen University

Guangdong

Installation summary

Platform: DVIA-M1000 — Serial 220126R7-1 (M1000_ 220126R7-1 Set up)

Target equipment: HITACHI SU8010

Place of installation: GUANGDONG

Remark: Good Performance

End user: SUN YAT-SEN UNIVERSITY

Operator: Lee, Young Ha

Date of setup: 23.04.13

Date of reporting: 23.04.19

Date of business trip: 17.12.27~17.12.29

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Measurement date: 2023.04.13 (Thursday),

Operator: DAEIL SYSTEMS, Youngha Lee

Place of measurement: GUANGDONG

Equipment Model: HITACHI SU8010

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.